Piezo-based Compact Tip/Tilt Mirror Platforms for Fast Laser Beam Steering

Small, Fast Tip/Tilt Platforms

PI (Physik Instrumente), leader in the field of piezo technology and precision motion systems and solutions, broadens its portfolio of piezo steering mirrors. With milli-second response and settling time and high dynamic linearity, the new S-335 fast steering mirror (FSM) platforms are ideal for precision image processing and image stabilization, laser beam steering, materials processing, and lithography.

2-Axis, Frictionless Guiding, No Polarization Rotation

S-335 steering mirror platforms provide precise angular tip/tilt motion of the top platform around two orthogonal axes. These flexure-guided, electro-ceramic driven systems can provide higher accelerations than other actuators, enabling step response times in the sub-millisecond range, with frictionless backlash-free motion. The single pivot-point design also prevents the drawback of polarization rotation, which is common with conventional 2-axis stacked systems, e.g. galvo scanners.

Long Ranges with Integrated Motion Amplifier

Integrated EDM flexure based motion amplifiers provide an industry-leading tip/tilt angle up to 35mrad, equal to an optical deflection angle of 70mrad (4°). ID chip support allows for fast start-up and a simple data exchange between tip/tilt platforms and controllers.

Parallel-Kinematics: Smaller with Improved Stability, Linearity & Dynamics

PI piezo steering mirrors are based on a parallel-kinematics design with coplanar rotational axes and a single moving platform driven by two pairs of differential actuators. The advantage is jitter-free, multi-axis motion with excellent temperature stability. Compared to stacked (two-stage) mirror scanners, the parallel-kinematics design provides symmetrical dynamic performance in both axes with faster response and better linearity in a smaller package.

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Standard and Custom

PI has over 4 decades of experience providing in-house engineered precision motion control solutions, and can quickly modify existing product designs or provide a fully customized OEM part to fit the exact requirements of the customer’s application.

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