Park Systems, World-Leader in Atomic Force Microscopes Presents Live Demo of Park NX-Hivac, High Vacuum AFM System for Failure Analysis

Park NX-Hivac High vacuum atomic force microscope for failure analysis and ​atmosphere-sensitive materials research

Park NX-Hivac,designed in collaboration with a major semiconductor IC producer, is a solution for ever shrinking nanoscale geometries of semiconductor devices which require sophisticated failure analysis tools, the trademark of Park Systems AFM.

Park Systems, a leader in Atomic Force Microscopy (AFM) since 1997 is hosting a free AFM Demo on Friday, March 24, 2017 from 5-7pm at their Santa Clara facility that will include craft beer and refreshments, a live Park NX-Hivac demo, and a special presentation from imec Senior Researcher, Dr. Tae-Gon Kim.

Dr. Tae-Gon Kim, Senior researcher at imec Belgium and adjunct professor at Hanyang University will make a presentation titled, “In-line (3D) AFM as Solution Provider for Beyond N10 Process” which will cover topics including solutions that in-line (3D) AFM provide and imec’s work advancing innovative AFM usage for semiconductor production capabilities. In his career, he has been leading research activity on advanced film characterization as well as in-line metrology techniques for STT-MRAM devices and in-line 3D-AFM technology for 3D structure characterization such as sidewall characterization of FinFET and Nanowire.

In 2015, Park Systems signed a Joint Development Project (JDP) with nanoelectronics research center imec and officially joined imec’s Industrial Affiliation Program (IIAP). Park Systems JDP with imec is focused on technological advances for AFM-based inline nanoscale metrology in semiconductor wafer production and in-line monitoring and analysis methodsresulting in improved device performance and production yield.

The presentation at Park…

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