DowDuPont Transportation & Advanced Polymers Introduces Kalrez® 9600 Perfluoroelastomer Parts

Kalrez® 9600 is an innovative product for the semiconductor fabricating industry and builds on the performance of Kalrez® 9100 and Kalrez® 9500. It offers longer seal life with better sealing functionality at higher temperatures in vacuum plasma processes.

DowDuPont Transportation and Advanced Polymers, a business segment of DowDuPont Specialty Products Division, announced today the introduction of DuPont™ Kalrez® 9600, an innovative perfluoroelastomer compound developed to meet the needs of the semiconductor fabricating industry.

A well-balanced, high-purity perfluoroelastomer product, Kalrez® 9600 provides longer seal life by offering enhanced performance properties in an array of aggressive and emerging high-temperature plasma applications. It has shown excellent ozone, ammonia, fluorine and oxygen radical resistance as well as ultralow outgassing and outstanding thermal stability. Kalrez® 9600 is based on a proprietary cross-linking system and is uniquely identifiable by its olive-green color. It is especially suited in plasma deposition applications such as atomic layer deposition and chemical vapor deposition, as well as etch processes used to fabricate next-gen chips in the semiconductor industry.

“Kalrez® 9600 is an innovative product for the semiconductor fabricating industry and builds on the performance of Kalrez® 9100 and Kalrez® 9500. It offers longer seal life with better sealing functionality at higher temperatures in vacuum plasma processes,” said Lakshmi Krishnamurthy, ‎Global Market segment leader, Electronics, Energy & Material Handling, DuPont™ Kalrez® and Vespel®. “The DuPont™ Kalrez® business is always looking for opportunities to innovate in ways that help our end-users and customers, and we’re pleased to be able to offer a sealing material that helps improve productivity, increase yield and reduce the total cost of ownership in semiconductor fabrication processes.”

Kalrez® 9600 joins a portfolio of high-performance materials that DowDuPont offers to the electronics industry and is supported by a world-class technical support team with notable expertise in sealing solutions. Kalrez® 9600 is available in a broad range of standard O-ring sizes and…

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